3HNE06771-1
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LAM RING, FOC STEPPED DFC 200MM 716-015595-002
 
LAM KIT, LINERS 2300 KIYO 715-801021-838 715-027638-814
 
LAM BASE, FOCUS RING QUARTZ 716-800951-001
 
LAM COIL, OUTER 13''O.D 715-802293-013
 
LAM KIT, LAM 2300 OXIDE PENDULUM VALVE 718-098592-001
 
LAM VAT PENDULUM VALVE GATE 200500 718-098591-001
 
LAM RING WP GENERIC DUAL GAS 716-027963-001 REV A
 
LAM RING, WIDE EDGE QUARTZREPAIR 716-331142-005 REV. B
 
LAM ASSY, ROTOR 210T0109-01
 
LAM VALVE, THROTTLE KF40 VAC GEN 853-005939-001
 
LAM RNG, BOT ADJ 8PLG 2300 300MM DZ 716-021209-368 REVB
 
LAM RING, POP ADJ CPLG 2300 300MM 716-021216-368REVA
 
LAM 60-121857-00 VAT 04027-R1, GATE, 50MM X 336MM, VITO
 
LAM PCB, SERVO AMP LOW POWER BM17756L01
 
LAM RESEARCH HANGER, 713-035125-001
 
LAM RESEARCH LINER/SPACER EXT GND RING 715-030860-001
 
LAM RESEARCH HOT EDGE SILICON RING P/N 716-023013-004
 
LAM RESEARCH FOCUS RING P/N 716-026652-002
 
LAM RESEARCH CHAMBER LINER O-RING P/N 010736-001
 
LAM RESEARCH OUTER ELECTRODE ASSY P/N 839-020965-006
Yokogawa DL 1200 A Digital Oscilloscope
2Msps Sampling Rate．ARM DSO Nano Pocket Oscilloscope
HITACHI OSCILLOSCOPE V-509 50MHZ
ARM DSO quad DS203 Pocket Size Oscilloscope 4CH DSO203
IWATSU TS8500 OSCILLOSCOPE 500 MHZ-4 CHANNEL - REPAIR

資訊來源：3HNE06771-1